✦ LIBER ✦
Suppression of parasitic bipolar action in ultra-thin-film fully-depleted CMOS/SIMOX devices by Ar-ion implantation into source/drain regions
✍ Scribed by Ohno, T.; Takahashi, M.; Kado, Y.; Tsuchiya, T.
- Book ID
- 114537265
- Publisher
- IEEE
- Year
- 1998
- Tongue
- English
- Weight
- 167 KB
- Volume
- 45
- Category
- Article
- ISSN
- 0018-9383
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