✦ LIBER ✦
Suppression of boron diffusion due to carbon during rapid thermal annealing of SiGe based device materials—some comments
✍ Scribed by M. S. A. Karunaratne; J. M. Bonar; P. Ashburn; A. F. W. Willoughby
- Book ID
- 106392837
- Publisher
- Springer
- Year
- 2006
- Tongue
- English
- Weight
- 692 KB
- Volume
- 41
- Category
- Article
- ISSN
- 0022-2461
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