Superior thermal stability of Ta/TaN bi-layer structure for copper metallization

✍ Scribed by Qi Xie; Xin-Ping Qu; Jing-Jing Tan; Yu-Long Jiang; Mi Zhou; Tao Chen; Guo-Ping Ru

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 582 KB
• Volume: 253
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2006.03.002