Superior damage-immunity of thin oxides thermally grown on reactive-ion-etched silicon surface in N2O ambient

✍ Scribed by Ueng, S.Y.; Chao, T.S.; Wang, P.J.; Chen, W.H.; Chang, D.C.; Cheng, H.C.

• Book ID: 114535717
• Publisher: IEEE
• Year: 1994
• Tongue: English
• Weight: 230 KB
• Volume: 41
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/16.285043