✦ LIBER ✦
Superior chemical–mechanical polishing performance of silica slurries made of surface-active siloxane/acrylic polymers
✍ Scribed by P.-L. Kuo; C.-L. Liao; S. K. Ghosh
- Book ID
- 106070283
- Publisher
- Springer
- Year
- 2001
- Weight
- 195 KB
- Volume
- 279
- Category
- Article
- ISSN
- 0340-255X
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