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Superhard coatings of the (Zr-Ti-Si)N and (Ti-Hf-Si)N systems produced by vacuum-arc deposition from a separated flow

✍ Scribed by Beresnev, V. M.; Klimenko, S. A.; Toryanik, I. N.; Pogrebnjak, A. D.; Sobol’, O. V.; Turbin, P. V.; Grankin, S. S.

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