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Superconducting thin films and ion beam patterning using metal carboxylate precursors

✍ Scribed by M.E. Gross; P.K. Gallagher; W.L. Brown

Book ID
104201407
Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
575 KB
Volume
32-33
Category
Article
ISSN
0167-2738

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An ion beam deposition system to produce isotopically pure epitaxial thin films of different materials has been designed and built. Using negative ions, problems due to mass interference with molecular ions could be significantly reduced, thus allowing the production, for instance, of 29 Si films of