Superconducting integrated circuit fabrication with low temperature ECR-based PECVD SiO/sub 2/ dielectric films

✍ Scribed by Sauvageau, J.E.; Burroughs, C.J.; Booi, P.A.A.; Cromar, M.W.; Benz, R.P.; Koch, J.A.

• Book ID: 126931987
• Publisher: IEEE
• Year: 1995
• Tongue: English
• Weight: 679 KB
• Volume: 5
• Category: Article
• ISSN: 1051-8223
• DOI: 10.1109/77.403046