Suitability of new polymer materials with adjustable glass temperature for nano-imprinting
✍ Scribed by K. Pfeiffer; G. Bleidiessel; G. Gruetzner; H. Schulz; T. Hoffmann; H.-C. Scheer; C.M. Sotomayor Torres; J. Ahopelto
- Publisher
- Elsevier Science
- Year
- 1999
- Tongue
- English
- Weight
- 726 KB
- Volume
- 46
- Category
- Article
- ISSN
- 0167-9317
No coin nor oath required. For personal study only.
✦ Synopsis
A new class of copolymers potentially suitable for an imprint process is investigated. They are composed of methyl-methacrylate and a methacrylic acid, where the acid component increases the glass temperature and thus the thermal stability. The results obtained are compared to previous experiments with a methyl/butyl acrylate and the suitability for an imprint process is discussed. A modified processing sequence is proposed, where pressure is applied during the heating phase, resulting in superior imprint quality of, for example, periodic patterns.