Subsurface defect of amorphous carbon film imaged by near field acoustic microscopy

✍ Scribed by J.T. Zeng; K.Y. Zhao; H.R. Zeng; H.Z. Song; L.Y. Zheng; G.R. Li; Q.R. Yin

• Book ID: 106020947
• Publisher: Springer
• Year: 2008
• Tongue: English
• Weight: 564 KB
• Volume: 91
• Category: Article
• ISSN: 1432-0630
• DOI: 10.1007/s00339-008-4408-3