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Substrate selectivity in the formation of microcrystalline silicon: Mechanisms and technological consequences

✍ Scribed by Roca i Cabarrocas, P.; Layadi, N.; Heitz, T.; Drévillon, B.; Solomon, I.


Book ID
120200725
Publisher
American Institute of Physics
Year
1995
Tongue
English
Weight
298 KB
Volume
66
Category
Article
ISSN
0003-6951

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