✦ LIBER ✦
Substrate-dependent growth of atmospheric pressure chemically vapor deposited silicon dioxide from dichlorosilane and oxygen
✍ Scribed by Jonathan D. Chapple-Sokol; Roy G. Gordon
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 746 KB
- Volume
- 171
- Category
- Article
- ISSN
- 0040-6090
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