✦ LIBER ✦
Substituted polyhydroxystyrenes as matrix resins for chemically amplified deep UV resist materials
✍ Scribed by Georg Pawlowski; Ralph Dammel; Charlotte Eckes; Charlet R. Lindley; Winfried Meier; Klaus-Jürgen Przybilla; Horst Röschert; Walter Spiess
- Book ID
- 103598252
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 344 KB
- Volume
- 13
- Category
- Article
- ISSN
- 0167-9317
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