✦ LIBER ✦
Subroutines for some plasma surface interaction processes: physical sputtering, chemical erosion, radiation enhanced sublimation, backscattering and thermal evaporation
✍ Scribed by Manoj Warrier; Ralf Schneider; Xavier Bonnin
- Book ID
- 108107238
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 296 KB
- Volume
- 160
- Category
- Article
- ISSN
- 0010-4655
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