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Submicron imprint of trench structures by external and intrinsic electromagnetic force

✍ Scribed by H. Hocheng; T.T. Wen

Book ID: 108094990
Publisher: International Academy for Production Engineering
Year: 2010
Tongue: English
Weight: 671 KB
Volume: 59
Category: Article
ISSN: 0007-8506
DOI: 10.1016/j.cirp.2010.03.012

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