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Acceleration sensors high-precision readout circuit for LIGA acceleration sensors, 46, 1% Accelerometers a novel resonant silicon accelerometer in bulk-micmmachinlng technology, 46, 185 airbag application: a microsystem including a silicon capacitive accelerometer, CMOS switched capacitor electronics and true self-test capability, 46, 190 silicon accelerometer based on thermopiles, 46, 201 performance limitations of surface-machined accelerometers fabricated in polysilicon gate material, 46, 205 A.c. magnetic-field measurement a.c. magnetic-field measurement using the fluxgate, 46, 307 Acoustic impedance analysis of the influence of the surface wettability on the quartz sensor response, 47, 357 Acoustics passivation of the interdigital transducers of acoustic sensors based on surface localized HPSWs for measurements in liquids, 47, 353 Acoustic sensors small pieaoresistive silicon microphones specially designed for the characterization of turbulent gas Bows, 46, 151 low pressure acoustic sensors for airborne sound with piezoresistive monocrystalline silicon and electrochemically etched diaphragms, 46, 156 Adaptive quantization adaptive quantization and fault detection in smart sensors, 47, 530 Airbags airbag application: a microsystem including a silicon capacitive accelerometer, CMOS switched capacitor electronics and true self-test capability, 46, 1% Air pollution spectrally selective gas cell for electmoptical infrared compact multigas sensor, 47, 417 Aluminium infrared thermopile sensors with high sensitivity and very low temperature coefficient, 47, 422 Aluminium nitride AlN/silicon Lamb-wave microsensors for pressure and gravimetric measurements, 46, 179 Anisotropic etching anisotropic etching of germanium, 46, 35 Anodic bonding selection of glass, ancdic bonding conditions and material compatibility for silicon-glass capacitive sensors, 46, 113 Anti-collision processes telemetric sensors by microwave interferometry, 44, 239 Array transducer an integrated array transducer receiver for ultrasound imaging, 41, 542 Atomic force microscopy AFM imaging with an ay-micropositioner with integrated tip, 47, 562 Automotives p(VDF-TrFB) copolymer sensor for passive IR detection in automotives, 47, 399 pulsed LIDAR for obstacle detection in the automotive field: the measurement of reflectance range data in scene analysis, 47, 497
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