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Bimorph structures biaxial scanning mirror activated by, for medical applications, 29 Biochemical application theory of operation of piezoelectric quartz crystal sensors for, 159 Bipolar readout electronics compatibility between, and microstructures in Si. 188 Bolometer thin-film, for high-frequency metrology, 423 Bonding low-temperature Si wafer, 340 Cadmium CdSe-based thin-film integrated optical sensors, 437 implanted homojunctions on LPE HgCdTe, 407 Calcium pure and Ca-moditied Pb titanate ceramics for pyroelectric sensors, 393 Calibration systems for strain gauges to be used at cryogenic temperatures, 125 Calorimetric transducers selective detection of organic molecules with polymers and supramolecular compounds; application of, 130 Camera inexpensive real-time 3-D, with smart optical sensor, 241 Capacitance sensors controlled selectivity of polysiloxane coatings; their use in, 326 Capacitance transducers selective detection of organic molecules with poiymers and supramolecular compounds, application of, 130 Capacitive pressure sensors transient response oc 616 Capacitive response micromachmed sensor structures with linear, 200 Car how many sensors does a car need?, 35 CCD detector array UV-sensitive. based on charge-induced depletion layers, 470 Charge amplifier integrated, for smart tactile sensor, 101 Chemical analyzing systems high-pressure micropump for integrated, 335 Chemical sensor compact optical, based on surface plasmon interrogation, 710 CMOS process smart accelerometer with on-chip electronics fabricated by commercial, 121 Coherence effects ditTractiona1 and, in linear moir6 displacement sensors, 588 Colour sensor colour measurement system for testing of integrated, 442 Compact disc player non-contact absolute position measurement using, optical pick-up, 575 Condenser microphone new, with p+ Si membrane, 149 Cryogenic temperatures calibration systems for strain gauges to be used at, 125 Crystal etching anisotropic; simulation program, 267 Current sensor new, using electron spin resonance, 174 Damping of piezoresistive Si accelerometers, 375 Data structures for multi-sensor integration, 491 Detector(s) semiconductor drift, for high resolution X-ray spectroscopy, 245 spatial resolution of diffusion-based Si nuclear radiation, 250 Dielectric induction micromotors field levitation and torque-frequency characteristics, 525 Dielectric layer comparison of SiO, and polyimide as, on stainless steel in thin-film pressure sensor manufacture, 611 Diffractional effects in linear *moire displacement sensors, 588 Digital techniques improve range measurement with ultrasound sensor, 545 Displacement sensor(s) diftractional and coherence effects in linear moire., 588 optical angular, with hi resolution integrated in Si. 591 Elsevier Sequoia
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