✦ LIBER ✦
Sub-μm, planarized, Nb-AlOx-Nb Josephson process for 125 mm wafers developed in partnership with Si technology
✍ Scribed by Ketchen, M. B.; Pearson, D.; Kleinsasser, A. W.; Hu, C.-K.; Smyth, M.; Logan, J.; Stawiasz, K.; Baran, E.; Jaso, M.; Ross, T.
- Book ID
- 127076807
- Publisher
- American Institute of Physics
- Year
- 1991
- Tongue
- English
- Weight
- 689 KB
- Volume
- 59
- Category
- Article
- ISSN
- 0003-6951
- DOI
- 10.1063/1.106405
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