✦ LIBER ✦
Sub-surface damage in indium phosphide caused by micromachining of grooves with femtosecond and nanosecond laser pulses
✍ Scribed by A. Borowiec; M. Couillard; G.A. Botton; H.K. Haugen
- Publisher
- Springer
- Year
- 2004
- Tongue
- English
- Weight
- 178 KB
- Volume
- 79
- Category
- Article
- ISSN
- 1432-0630
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