Sub-micron spatial resolution Raman spectroscopy and its application to stress mapping in silicon

✍ Scribed by S. Webster; D.A. Smith; D.N. Batchelder; S. Karlin

• Book ID: 117542872
• Publisher: Elsevier Science
• Year: 1999
• Tongue: English
• Weight: 318 KB
• Volume: 102
• Category: Article
• ISSN: 0379-6779
• DOI: 10.1016/s0379-6779(98)01103-5