✦ LIBER ✦
Sub-micron period grating structures in Ta2O5 thin oxide films patterned using UV laser post-exposure chemically assisted selective etching
✍ Scribed by S. Pissadakis; A. Ikiades; C.Y. Tai; N.P. Sessions; J.S. Wilkinson
- Book ID
- 113936645
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 279 KB
- Volume
- 453-454
- Category
- Article
- ISSN
- 0040-6090
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