Sub-micron coatings with low friction and wear for micro actuators

✍ Scribed by R. Bandorf; H. Lüthje; K. Schiffmann; T. Staedler; A. Wortmann

• Book ID: 106184471
• Publisher: Springer-Verlag
• Year: 2002
• Tongue: English
• Weight: 127 KB
• Volume: 8
• Category: Article
• ISSN: 0946-7076
• DOI: 10.1007/s00542-001-0155-5