✦ LIBER ✦
Sub-micron channeling contrast microscopy on reactive ion etched deep Si microstructures
✍ Scribed by E.J. Teo; M Alkaisi; A.A. Bettiol; T. Osipowicz; J. Van Kan; F. Watt; A. Markwitz
- Book ID
- 114165526
- Publisher
- Elsevier Science
- Year
- 2002
- Tongue
- English
- Weight
- 498 KB
- Volume
- 190
- Category
- Article
- ISSN
- 0168-583X
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