Sub-half micron metallization using high-pressure Al: Invited lecture

✍ Scribed by Paul Rich

• Book ID: 114155685
• Publisher: Elsevier Science
• Year: 1997
• Tongue: English
• Weight: 361 KB
• Volume: 37-38
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/s0167-9317(97)00126-3