Sub-diffraction-limited patterning using evanescent near-field optical lithography

✍ Scribed by Alkaisi, M. M.; Blaikie, R. J.; McNab, S. J.; Cheung, R.; Cumming, D. R. S.

• Book ID: 121380769
• Publisher: American Institute of Physics
• Year: 1999
• Tongue: English
• Weight: 422 KB
• Volume: 75
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.125388