Sub-500-nm patterning of glass by nanosecond KrF excimer laser ablation

✍ Scribed by Bekesi, J.; Meinertz, J.; Simon, P.; Ihlemann, J.

• Book ID: 118782259
• Publisher: Springer
• Year: 2012
• Tongue: English
• Weight: 608 KB
• Volume: 110
• Category: Article
• ISSN: 1432-0630
• DOI: 10.1007/s00339-012-7313-8