✦ LIBER ✦
Sub-100 nm Si nanowire and nano-sheet array formation by MacEtch using a non-lithographic InAs nanowire mask
✍ Scribed by Shin, Jae Cheol; Zhang, Chen; Li, Xiuling
- Book ID
- 120329065
- Publisher
- Institute of Physics
- Year
- 2012
- Tongue
- English
- Weight
- 1018 KB
- Volume
- 23
- Category
- Article
- ISSN
- 0957-4484
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