Sub 100 nm proton beam micromachining: theoretical calculations on resolution limits

✍ Scribed by J.A van Kan; T.C Sum; T Osipowicz; F Watt

• Book ID: 114171890
• Publisher: Elsevier Science
• Year: 2000
• Tongue: English
• Weight: 333 KB
• Volume: 161-163
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(99)00862-9