SU-8 as a structural material for labs-on-chips and microelectromechanical systems

✍ Scribed by Patrick Abgrall; Veronique Conedera; Henri Camon; Anne-Marie Gue; Nam-Trung Nguyen

• Publisher: John Wiley and Sons
• Year: 2007
• Tongue: English
• Weight: 592 KB
• Volume: 28
• Category: Article
• ISSN: 0173-0835
• DOI: 10.1002/elps.200700333