✦ LIBER ✦
Study on the spatial resolution of a furfuryl alcohol-negative photoresist using a holographic system
✍ Scribed by M. Sthel; J. Rieumont; R. Martinez
- Publisher
- John Wiley and Sons
- Year
- 1999
- Tongue
- English
- Weight
- 147 KB
- Volume
- 71
- Category
- Article
- ISSN
- 0021-8995
No coin nor oath required. For personal study only.
✦ Synopsis
A negative photoresist was obtained from furfury alcohol using methylene dichloride as a solvent and trifluoracetic acid as a catalyst. A holographic assembly with a blue laser failed to give interference patterns. However, a periodic interference pattern was printed on a film of furfuryl alcohol resin using an ultraviolet laser with a coherent beam at 360 nm. The period of the pattern was reproduced throughout the film and resulted about 0.46 m. Thus, the resin obtained was able to reach a resolution about 0.23 m.