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Study on self-bias voltage induced on the substrate by r.f. bias power in a high density plasma

✍ Scribed by Jung-Hyung Kim; Yong-Hyun Shin; Kwang-Hwa Chung

Book ID: 108388649
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 194 KB
Volume: 435
Category: Article
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(03)00385-7

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