✦ LIBER ✦
Study on sapphire removal for thin-film LEDs fabrication using CMP and dry etching
✍ Scribed by Shengjun Zhou; Sheng Liu
- Book ID
- 108064092
- Publisher
- Elsevier Science
- Year
- 2009
- Tongue
- English
- Weight
- 254 KB
- Volume
- 255
- Category
- Article
- ISSN
- 0169-4332
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