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Study on oxidization of Ru and its application as electrode of PZT capacitor for FeRAM

✍ Scribed by Ze Jia; Tian-ling Ren; Tian-zhi Liu; Hong Hu; Zhi-gang Zhang; Dan Xie; Li-tian Liu

Book ID: 103843708
Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 604 KB
Volume: 138
Category: Article
ISSN: 0921-5107
DOI: 10.1016/j.mseb.2007.01.009

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