Study on excimer laser irradiation for controlled dehydrogenation and crystallization of boron doped hydrogenated amorphous/nanocrystalline silicon multilayers

✍ Scribed by Gontad, F.; Conde, J.C.; Filonovich, S.; Cerqueira, M.F.; Alpuim, P.; Chiussi, S.

• Book ID: 121691010
• Publisher: Elsevier Science
• Year: 2013
• Tongue: English
• Weight: 994 KB
• Volume: 536
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2013.04.005