✦ LIBER ✦
Study on application of magnetic levitation utilizing HTS bulks to spin processors for photo mask production
✍ Scribed by S. Fukui; R. Sato; J. Ogawa; T. Oka; M. Yamaguchi; T. Sato; S. Miyazaki; T. Sasahara; T. Tamaki; S. Nishiwaki; Y. Yuki
- Book ID
- 104083478
- Publisher
- Elsevier Science
- Year
- 2007
- Tongue
- English
- Weight
- 631 KB
- Volume
- 463-465
- Category
- Article
- ISSN
- 0921-4534
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