✦ LIBER ✦
Study of thin Film Formation From Silicon-Containing Precursors Produced by an RF Non-Thermal Plasma Jet at Atmospheric Pressure
✍ Scribed by J. Schäfer; R. Foest; F. Sigeneger; D. Loffhagen; K.-D. Weltmann; U. Martens; R. Hippler
- Book ID
- 115554937
- Publisher
- John Wiley and Sons
- Year
- 2012
- Tongue
- English
- Weight
- 347 KB
- Volume
- 52
- Category
- Article
- ISSN
- 0005-8025
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