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Study of thermal effects in GaAs micromachined power sensor microsystems by an optical interferometer technique

✍ Scribed by D. Pogany; N. Seliger; T. Lalinský; J. Kuzmík; P. Habaš; P. Hrkút; E. Gornik


Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
586 KB
Volume
29
Category
Article
ISSN
0026-2692

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