✦ LIBER ✦
Study of the technological limitations of photolithography for the relief surface of a SOI wafer during formation of the three-dimensional micromechanical structure of an integral tensoconverter
✍ Scribed by L. V. Sokolov, A. A. Zhukov, N. M. Parfenov…
- Book ID
- 120948475
- Publisher
- Pleiades Publishing
- Year
- 2013
- Tongue
- English
- Weight
- 369 KB
- Volume
- 7
- Category
- Article
- ISSN
- 1027-4510
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