Study of the surface properties of thermally oxidized silicon using surface acoustic wave attentuation : R. T. Webster, H. Estrada-Vazquez, P. Das and R. Bharat. Solid-St. Electron.22, 541 (1979)

• Publisher: Elsevier Science
• Year: 1980
• Tongue: English
• Weight: 134 KB
• Volume: 20
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(80)90327-3