Study of the pulsed laser vapor doping of Si(1 0 0) with KrF excimer laser and BCl3 gas

✍ Scribed by Wei Lin Shi; Xiying Ma

• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 120 KB
• Volume: 230
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2003.11.056