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Study of the influence of the substrate temperature and the deposition rate and time on surface morphology

✍ Scribed by V. A. Vasil’ev, P. S. Chernov

Book ID: 120948526
Publisher: Pleiades Publishing
Year: 2013
Tongue: English
Weight: 602 KB
Volume: 7
Category: Article
ISSN: 1027-4510
DOI: 10.1134/S1027451013030361

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