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Study of the chemical reactions' influence on semiconductor films structure formation by the Monte-Carlo method

✍ Scribed by Prof. Dr. L. N. Aleksandrov; A. N. Kogan; R. V. Bochkova; N. P. Tikhonova

Publisher: John Wiley and Sons
Year: 1988
Tongue: English
Weight: 595 KB
Volume: 23
Category: Article
ISSN: 0232-1300
DOI: 10.1002/crat.2170230202

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