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Study of the balmer beta core in a pulsed plasma

✍ Scribed by F. Torres; M.A. Gigosos; S. Mar

Publisher
Elsevier Science
Year
1984
Tongue
English
Weight
266 KB
Volume
31
Category
Article
ISSN
0022-4073

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## Abstract The pulsed DC hollow cathode discharge has been studied in the low pressure plasma jet sputtering system by means of cylindrical Langmuir probe. Measurements have been performed in pure Ar with the flow rate of 30 sccm. The repetition frequency of the pulses of 1 kHz has been chosen wit