✦ LIBER ✦
Study of the 300-mm CoSi2 defects induced by Soft Sputter Etch process before cobalt deposition—characterization, design of experiment and 200/300 mm comparison
✍ Scribed by A. Humbert; C. Regnier; G. Braeckelmann; M.-T. Basso; P. Ferreira
- Book ID
- 104062046
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 402 KB
- Volume
- 114-115
- Category
- Article
- ISSN
- 0921-5107
No coin nor oath required. For personal study only.