Study of temperature-dependent ultrathin oxide growth on Si(111) using variable-angle spectroscopic ellipsometry

✍ Scribed by Bhola N. De; John A. Woollam

• Book ID: 114085807
• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 312 KB
• Volume: 193-194
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/s0040-6090(05)80040-9