✦ LIBER ✦
Study of stress and adhesion strength in SU-8 resist layers on silicon substrate with different seed layers
✍ Scribed by Ghantasala, Muralidhar K.
- Book ID
- 120708483
- Publisher
- The International Society for Optical Engineering
- Year
- 2007
- Tongue
- English
- Weight
- 459 KB
- Volume
- 6
- Category
- Article
- ISSN
- 1932-5150
No coin nor oath required. For personal study only.