✦ LIBER ✦
Study of SiO2 surface sputtering by a 250–550 keV He+ ion beam during high-resolution Rutherford backscattering measurements
✍ Scribed by Susumu Kusanagi; Hajime Kobayashi
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 250 KB
- Volume
- 249
- Category
- Article
- ISSN
- 0168-583X
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