✦ LIBER ✦
Study of reactive ion etched nanometer size trenches using a combined scanning electron microscope and scanning tunneling microscope: Rosolen, G. C.; Wong, T. K. S.; Welland, M. E. Nanotechnology. 1992 Apr
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 135 KB
- Volume
- 15
- Category
- Article
- ISSN
- 0141-6359
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