X-ray Photoelectron Spectroscopy Study o
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Kibel, Martyn H.; Leech, Patrick W.
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Article
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1996
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John Wiley and Sons
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English
β 667 KB
This paper describes the characterization by x-ray photoelectron spectroscopy (XPS) of several Ge-doped silica glasses before and after reactive ion etching (ME) in sulphur hexafluoride (SF,). These glasses have been commonly used in the production of optical waveguides, with varying amounts of GeO,