✦ LIBER ✦
Study of plasma CVD silicon-germanium films using electron beam techniques : J. Wood, M. M. El-Gomati, S. D. Waterman, T. El-Bakush and M. E. Law. Vacuum 43(1/2), 111 (1992)
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 81 KB
- Volume
- 32
- Category
- Article
- ISSN
- 0026-2714
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